EDWARD'S IPUP DRY VACUUM PUMPS

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Edward's IPUP2 dry Vacuum Pump is an integrated point-of-use pump made for transfer chamber applications where a highly clean, contaminant-free vacuum is required, as well as load blocking on fabrication platforms, applied materials and for use by semiconductor manufacturers.

The Edward's IPUP2 dry vacuum pump is a second-generation device, although this manufacturer also has a first-generation series of IPUP dry pumps. All Edwards' IPUP dry pumps reduce pumping times by 50%, use 70% less energy and require no maintenance between checks.

Its compact, energy-efficient dry pump system that can be mounted on the tool or remotely, is designed to
offer an extremely low cost of production.

The Edwards' IPUP2 and IPUP1 is designed for use in clean service applications only and is not intended for use with potentially flammable, corrosive, toxic or other hazardous gases, as these gases or oxygen can mix within the pumping system.